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Micro-Nano Electronics Lab

发布时间:2023-07-14 21:22    浏览次数:    来源:

Research interests:

1. New type of semiconductive micro-nano materials and devices:

New type of semiconductive micro-nano materials benefit from unique physical&chemical properties, size effect, interfacial effect, quantum effect and so on. The resulting new physics, new concepts and new phenomena can be applied to diverse semiconductor information devices.

2. Semiconductor device processes:

Micro-nano processing technology, especially sub-100 nm technology node, is the core technology in top chip manufacturing. The combination of laser direct writing technology and modern lithography technology, makes it possible to achieve a sub-100 nm overlay accuracy by small lithography machines, which offers a solution for the research and development for front-end process of chip at laboratory level, and provides technical support for the integration of new semiconductor micro-nano devices.

3. Scanning probe technology:

Scanning probe technology based on optical, electronic and physical probes is the "touchstone" for the exploration of microscopic world and characterization of micro-nano device.

4. “A to P” integration:

Atom to Product (“A to P”) means an integration over 10-10 m to 100 m. “A to P” is a process with the purpose that starts from a single atom or molecule, achieves a functional device array by precisely manipulating the self-assembly of atoms or molecules, then forms chips with back-end integrated circuits, and finally realizes productization.

Contact information

Professor Yang: ymyang@dlut.edu.cn

Assistant Professor Xu: xujiao@dlut.edu.cn

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